Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning

Document Details

Document Type: Pub Defense Publication
Publication Date: Oct 01, 2020
Source ID: 10.1109/jmems.2020.3009310

Entities

People

Gary K. Fedder
Suresh Santhanam
Tamal Mukherjee
Vincent P. J. Chung
Yi-Chung Lin

Organizations

Defense Advanced Research Projects Agency