Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 01, 2020
- Source ID
- 10.1109/jmems.2020.3012109
Entities
People
- Gabrielle D. Vukasin
- Hyun-Keun Kwon
- Nicholas E. Bousse
- Thomas W. Kenny
Organizations
- Defense Advanced Research Projects Agency
- National Science Foundation