Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2020
Source ID
10.1109/jmems.2020.3012925

Entities

People

  • David Heinz
  • Dongsuk D. Shin
  • Ernest T.-t. Yen
  • Gabrielle D. Vukasin
  • Hyun-Keun Kwon
  • Janna Glaze
  • Nathan Bissel
  • Nicholas E. Bousse
  • Thomas W. Kenny
  • Veronica K. Sanchez

Organizations

  • Defense Advanced Research Projects Agency
  • National Nanotechnology Initiative
  • National Science Foundation