Resonant MEMS Accelerometer With CW Laser Excitation
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 01, 2020
- Source ID
- 10.1109/jmems.2020.3015291
Entities
People
- Ansas M. Kasten
- David C Lin
- Marco Aimi
- Mengli Wang
- Russell Craddock
- Sergei Zotov
- William A. Challener
Organizations
- Defense Advanced Research Projects Agency