Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2020
Source ID
10.1109/jmems.2020.3020568

Entities

People

  • Christian A Zorman
  • Hailong Chen
  • Hao Jia
  • Philip X-L Feng

Organizations

  • Defense Threat Reduction Agency
  • National Science Foundation