Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2020
Source ID
10.1109/jmems.2020.3021947

Entities

People

  • Anne L. Alter
  • Dongsuk D. Shin
  • Ian B. Flader
  • Lizmarie Comenencia Ortiz
  • Thomas W. Kenny
  • Yunhan Chen

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation