Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2020
Source ID
10.1109/jmems.2020.3022050

Entities

People

  • Dongsuk D. Shin
  • Gabrielle D. Vukasin
  • Haoshen Zhu
  • Ian B. Flader
  • James M. L. Miller
  • Subramanian Sundaram
  • Thomas W. Kenny
  • Yunhan Chen

Organizations

  • Center for Hierarchical Manufacturing
  • Defense Advanced Research Projects Agency
  • National Natural Science Foundation of China
  • National Science Foundation