Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators

Document Details

Document Type: Pub Defense Publication
Publication Date: Dec 01, 2020
Source ID: 10.1109/jmems.2020.3022765

Entities

People

Benoit Hamelin
Farrokh Ayazi
Jeremy Yang

Organizations

National Science Foundation