Numerical Modelling of Non-Linearities in MEMS Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2020
Source ID
10.1109/jmems.2020.3026085

Entities

People

  • Anne L. Alter
  • Attilio Alberto Frangi
  • Gabriele Gattere
  • Gabrielle D. Vukasin
  • Saisneha Koppaka
  • Thomas W. Kenny
  • Valentina Zega

Organizations

  • Defense Advanced Research Projects Agency
  • ECSEL Joint Undertaking
  • National Science Foundation