A Chip-Scale, Low Cost PVD System

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2020
Source ID
10.1109/jmems.2020.3026533

Entities

People

  • Alexander Stange
  • D. J. Bishop
  • Lawrence Barrett
  • Nicholas E. Fuhr
  • Richard Lally

Organizations

  • National Science Foundation
  • Sony Corporation of America