A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2020
Source ID
10.1109/jmems.2020.3026547

Entities

People

  • Ahmed E. Hassanien
  • Michael Breen
  • Ruochen Lu
  • Songbin Gong
  • Yansong Yang