A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2020
- Source ID
- 10.1109/jmems.2020.3026547
Entities
People
- Ahmed E. Hassanien
- Michael Breen
- Ruochen Lu
- Songbin Gong
- Yansong Yang