Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2021
Source ID
10.1109/jmems.2020.3040953

Entities

People

  • Hui Yu
  • Matteo Rinaldi
  • Sungho Kang
  • Zhenyun Qian

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation