Feedforward Control Algorithms for MEMS Galvos and Scanners

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2021
Source ID
10.1109/jmems.2021.3074301

Entities

People

  • D. J. Bishop
  • David Campbell
  • Josh Javor
  • Lawrence Barrett
  • Matthias Imboden

Organizations

  • National Science Foundation