Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 °C Up to 325 °C

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2021
Source ID
10.1109/jmems.2021.3089703

Entities

People

  • Bruce Alphenaar
  • Ji-Tzuoh Lin
  • Philip X-L Feng
  • Wen Sui
  • Xu-Qian Zheng

Organizations

  • Defense Threat Reduction Agency