A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2021
Source ID
10.1109/jmems.2021.3100077

Entities

People

  • Boqian Sun
  • Dingkang Wang
  • Dongqi Zheng
  • Huikai Xie
  • Sanjeev J. Koppal

Organizations

  • National Science Foundation
  • Office of Naval Research