Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2021
Source ID
10.1109/jmems.2021.3109034

Entities

People

  • Alexandra Efimovskaya
  • Andrei M. Shkel
  • Yu-Wei Lin

Organizations

  • Defense Advanced Research Projects Agency
  • National Institute of Standards and Technology