Fabrication of 32 × 32 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on a Borosilicate Glass Substrate With Silicon-Through-Wafer Interconnects Using Sacrificial Release Process

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2021
Source ID
10.1109/jmems.2021.3111304

Entities

People

  • Ali Önder Biliroğlu
  • Chunkyun Seok
  • Feysel Yalçın Yamaner
  • Oluwafemi Joel Adelegan
  • Omer Oralkan
  • Tamzid Ibn Minhaj
  • Zachary A. Coutant

Organizations

  • National Science Foundation