Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2022
Source ID
10.1109/jmems.2022.3146850

Entities

People

  • Antea Risso
  • Matteo Rinaldi
  • Sila Deniz Calisgan
  • Sungho Kang
  • Vageeswar Rajaram
  • Zhenyun Qian

Organizations

  • ARPA-E
  • Northeastern University