Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2022
Source ID
10.1109/jmems.2022.3166212

Entities

People

  • Anwesha Mukherjee
  • Evgeny Pikhay
  • Idan Shem Tov
  • Joseph Hayon
  • M. Shach-caplan
  • Niv Mizrahi
  • Yaakov Roizin
  • Yossi Rosenwaks

Organizations

  • Israel Innovation Authority
  • Office of Naval Research Global
  • Tel Aviv University