Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2022
Source ID
10.1109/jmems.2022.3199231

Entities

People

  • Andrei M. Shkel
  • Austin Parrish
  • Danmeng Wang
  • Doreen Hii
  • Mohammad H. Asadian
  • Wei Guan

Organizations

  • Defense Advanced Research Projects Agency
  • National Institute of Standards and Technology
  • University of California, Irvine