Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2022
- Source ID
- 10.1109/jmems.2022.3199231
Entities
People
- Andrei M. Shkel
- Austin Parrish
- Danmeng Wang
- Doreen Hii
- Mohammad H. Asadian
- Wei Guan
Organizations
- Defense Advanced Research Projects Agency
- National Institute of Standards and Technology
- University of California, Irvine