Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2022
Source ID
10.1109/jmems.2022.3204449

Entities

People

  • Abhay Kochhar
  • Gabriel Vidal-Álvarez
  • Gianluca Piazza
  • Luca Colombo
  • Pietro Simeoni
  • Umut Soysal

Organizations

  • Carnegie Mellon University
  • Defense Advanced Research Projects Agency