A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2023
Source ID
10.1109/jmems.2022.3224476

Entities

People

  • Alexander Stange
  • D. J. Bishop
  • Diego Pérez-Morelo
  • Lawrence Barrett
  • Matthias Imboden
  • Richard Lally

Organizations

  • Boston University
  • Defense Advanced Research Projects Agency
  • National Science Foundation