Silicon Nitride in Silicon Photonics
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2018
- Source ID
- 10.1109/jproc.2018.2861576
Entities
People
- Arne Leinse
- Chris Roeloffzen
- Daniel J Bluementhal
- Douwe Geuzebroek
- Rene Heideman
Organizations
- Defense Advanced Research Projects Agency
- Keysight Technologies