Silicon MEMS Disk Resonator Gyroscope With an Integrated CMOS Analog Front-End

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2014
Source ID
10.1109/jsen.2014.2335735

Entities

People

  • Bernhard E. Boser
  • David A. Horsley
  • Mitchell H. Kline
  • Parsa Taheri-Tehrani
  • Sarah H. Nitzan
  • Tsanh-hung Su

Organizations

  • Defense Advanced Research Projects Agency