Silicon MEMS Disk Resonator Gyroscope With an Integrated CMOS Analog Front-End
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 01, 2014
- Source ID
- 10.1109/jsen.2014.2335735
Entities
People
- Bernhard E. Boser
- David A. Horsley
- Mitchell H. Kline
- Parsa Taheri-Tehrani
- Sarah H. Nitzan
- Tsanh-hung Su
Organizations
- Defense Advanced Research Projects Agency