Localized Eutectic Trimming of Polysilicon Microhemispherical Resonating Gyroscopes
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 01, 2014
- Source ID
- 10.1109/jsen.2014.2344851
Entities
People
- Benoit Hamelin
- Farrokh Ayazi
- Vahid Tavassoli