Micromachined In-Plane Pressure-Gradient Piezoelectric Microphones

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2015
Source ID
10.1109/jsen.2014.2361118

Entities

People

  • Alexandro Rocha
  • Donghwan Kim
  • Michael L. Kuntzman
  • Neal A. Hall
  • Nishshanka N. Hewa-kasakarage

Organizations

  • Defense Advanced Research Projects Agency