A 3D-HARPSS Polysilicon Microhemispherical Shell Resonating Gyroscope: Design, Fabrication, and Characterization

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2015
Source ID
10.1109/jsen.2015.2431857

Entities

People

  • Curtis L. Mayberry
  • Farrokh Ayazi
  • Peng Shao
  • Vahid Tavassoli

Organizations

  • Defense Advanced Research Projects Agency