High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 01, 2015
- Source ID
- 10.1109/jsen.2015.2432021
Entities
People
- Alexander A. Trusov
- Andrei M. Shkel
- Brenton R. Simon
- Sergei A. Zotov