Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2018
Source ID
10.1109/jstqe.2018.2808258

Entities

People

  • Clemens Herkommer
  • Junqiu Liu
  • Martin H. P. Pfeiffer
  • Michael Geiselmann
  • Michael Zervas
  • Tiago Morais
  • Tobias Kippenberg

Organizations

  • Defense Advanced Research Projects Agency
  • Swiss National Science Foundation