Scalable 3D Silicon Photonic Electronic Integrated Circuits and Their Applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2020
Source ID
10.1109/jstqe.2020.2975656

Entities

People

  • Anirban Samanta
  • Kuanping Shang
  • S. J. Ben Yoo
  • Yu Zhang

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • Office of Naval Research
  • United States Department of Defense

Tags

Technology Areas

  • Microelectronics