Distributed Intelligent MEMS: Progresses and Perspectives

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2015
Source ID
10.1109/jsyst.2013.2281124

Entities

People

  • Julien Bourgeois
  • Seth Copen Goldstein

Organizations

  • Agence Nationale de la Recherche
  • National Science Foundation