AlN Barriers for Capacitance Reduction in Phase-Change RF Switches

Document Details

Document Type: Pub Defense Publication
Publication Date: May 01, 2016
Source ID: 10.1109/led.2016.2539542

Entities

People

Gregory Slovin
James A. Bain
Jeyanandh Paramesh
Min Xu
T. E. Schlesinger

Organizations

Defense Advanced Research Projects Agency
Office of Naval Research