Sub-10-nm Fin-Width Self-Aligned InGaAs FinFETs
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 01, 2016
- Source ID
- 10.1109/led.2016.2596764
Entities
People
- Alon Vardi
- Jesús A. del Alamo
Organizations
- Defense Threat Reduction Agency
- Korea Institute of Science and Technology
- Lam Research
- National Science Foundation