Alcohol-Based Digital Etch for III–V Vertical Nanowires With Sub-10 nm Diameter

Document Details

Document Type
Pub Defense Publication
Publication Date
May 01, 2017
Source ID
10.1109/led.2017.2690598

Entities

People

  • Dongsung Choi
  • Jesús A. del Alamo
  • Salim El Kazzi
  • Wenjie Lu
  • Xin Zhao

Organizations

  • Defense Threat Reduction Agency
  • Korea Institute of Science and Technology
  • Lam Research
  • National Science Foundation
  • Samsung Group