Coupled BAW/SAW Resonators Using AlN/Mo/Si and AlN/Mo/GaN Layered Structures

Document Details

Document Type: Pub Defense Publication
Publication Date: Feb 01, 2019
Source ID: 10.1109/led.2018.2890755

Entities

People

Afzaal Qamar
Mina Rais-zadeh

Organizations

Defense Advanced Research Projects Agency