Ferroelectric Switching in Sub-20 nm Aluminum Scandium Nitride Thin Films

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2020
Source ID
10.1109/led.2020.3034576

Entities

People

  • Alexandre C Foucher
  • Dixiong Wang
  • Eric Stach
  • Jeffrey Zheng
  • Pariasadat Musavigharavi
  • Roy H. Olsson
  • Susan Trolier-McKinstry
  • Wanlin Zhu

Organizations

  • Defense Advanced Research Projects Agency
  • Semiconductor Research Corporation
  • University of Pennsylvania