Ultrathin InGaO Thin Film Transistors by Atomic Layer Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2023
Source ID
10.1109/led.2022.3233080

Entities

People

  • Adam Charnas
  • Dongqi Zheng
  • Jie Zhang
  • Peide Ye
  • Zehao Lin
  • Zhuocheng Zhang

Organizations

  • Air Force Office of Scientific Research
  • Defense Advanced Research Projects Agency
  • Purdue University
  • Semiconductor Research Corporation