X–Ka Band Epitaxial ScAlN/AlN/NbN/SiC High-Overtone Bulk Acoustic Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2023
Source ID
10.1109/led.2023.3243437

Entities

People

  • Brian P. Downey
  • D. S. Katzer
  • Matt Hardy
  • Vikrant J Gokhale

Organizations

  • Defense Advanced Research Projects Agency
  • Office of Naval Research
  • United States Naval Research Laboratory