15-GHz Epitaxial AlN FBARs on SiC Substrates

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2023
Source ID
10.1109/led.2023.3268863

Entities

People

  • Debdeep Jena
  • Huili Grace Xing
  • James C. M. Hwang
  • Kazuki Nomoto
  • Lei Li
  • Mohammad Javad Asadi
  • Reet Chaudhuri
  • Wenwen Zhao

Organizations

  • Cornell University
  • Defense Advanced Research Projects Agency
  • Semiconductor Research Corporation