A mm-Wave Trilayer AlN/ScAlN/AlN Higher Order Mode FBAR

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2023
Source ID
10.1109/lmwt.2023.3271865

Entities

People

  • Amir Mortazawi
  • Ding Wang
  • Ping Wang
  • Suhyun Nam
  • Wenhao Peng
  • Zetian Mi

Organizations

  • Defense Advanced Research Projects Agency
  • University of Michigan