Sacrificial Structure for Effective Sapphire Substrate Liftoff Based on Photoelectrochemical Etching

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1109/lpt.2015.2392108

Entities

People

  • Chi-ming Weng
  • Chia-ying Su
  • Chieh Hsieh
  • Chih-Chung Yang
  • Ting-ta Chi
  • Yean-woei Kiang

Organizations

  • Air Force Office of Scientific Research
  • Ministry of Science and Technology, Israel