Quarter-Micron Alignment of Chiplets via Positive Self-Aligned Structures

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2023
Source ID
10.1109/lpt.2023.3308058

Entities

People

  • Muhannad S. Bakir
  • Shengtao Yu
  • Thomas K. Gaylord

Organizations

  • Georgia Tech
  • National Science Foundation
  • United States Air Force