An Ultrahigh Vacuum Packaging Process Demonstrating Over 2 Million Q-Factor in MEMS Vibratory Gyroscopes

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2017
Source ID
10.1109/lsens.2017.2762287

Entities

People

  • Andrei M. Shkel
  • Mohammad H. Asadian
  • Sina Askari

Organizations

  • Defense Advanced Research Projects Agency