Blocking Pressure Enhancement in SOI Through-Wafer Monolithic Knudsen PUMPs

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 09, 2022
Source ID
10.1109/mems51670.2022.9699567

Entities

People

  • Tsenguun Byambadorj
  • Yogesh B. Gianchandani
  • Yutao Qin

Organizations

  • Intelligence Advanced Research Projects Activity
  • Office of the Director of National Intelligence
  • University of Michigan