Digital Manufacturing of Resonance Mems From A Single-Layer Fused Silica Material

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 09, 2022
Source ID
10.1109/mems51670.2022.9699685

Entities

People

  • Andrei M. Shkel
  • Daryosh Vatanparvar

Organizations

  • Defense Advanced Research Projects Agency
  • Office of Naval Research
  • United States Navy
  • University of California