Intrinsically Tunable Laminated Ferroelectric Scandium Aluminum Nitride Extensional Resonator Based on Local Polarization Switching

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 09, 2022
Source ID
10.1109/mems51670.2022.9699790

Entities

People

  • Dicheng Mo
  • Roozbeh Tabrizian
  • Shaurya Dabas
  • Sushant Rassay

Organizations

  • Defense Advanced Research Projects Agency
  • University of Florida