Fused Silica Dual-Shell Gyroscope with In-Plane Actuation by Out-Of-Plane Electrodes Realized Using Glassblowing and Thru-Glass-Vias Fabrication

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 09, 2022
Source ID
10.1109/mems51670.2022.9699792

Entities

People

  • Andrei M. Shkel
  • Danmeng Wang
  • Doreen Hii
  • Mohammad H. Asadian

Organizations

  • Defense Advanced Research Projects Agency
  • University of California