Temperature Coefficient of Resonance Frequency (TCf) of β-Ga2O3 Nanomechanical Resonators
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 25, 2021
- Source ID
- 10.1109/mems51782.2021.9375190
Entities
People
- Philip X-L Feng
- Xu-Qian Zheng
Organizations
- Defense Threat Reduction Agency