Lateral Flexure Contact on CMOS MEMS Electrothermal Metal-Metal Contact Switch by Platinum ALD Sidewall Patterning

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 25, 2021
Source ID
10.1109/mems51782.2021.9375367

Entities

People

  • Gary K. Fedder
  • Sean Yen
  • Tamal Mukherjee
  • Yi-Chung Lin

Organizations

  • Defense Advanced Research Projects Agency