Design and Fabrication of a Forward View Scanner on SiOB with Latch Structure for Improved Vertical Orientation

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 25, 2021
Source ID
10.1109/mems51782.2021.9375454

Entities

People

  • Boqian Sun
  • Dingkang Wang
  • Dongqi Zheng
  • Huikai Xie
  • Sanjeev J. Koppal

Organizations

  • Office of Naval Research